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A complete internal mechanical stress analysis of multilayer composite leads to optimized coating process control for 50 GHz thin film filters

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4 Author(s)
Pan, J.J. ; Lightwaves2020 Inc., Milpitas, CA, USA ; Joy Jiang ; Feng Qing Zhou ; Guo, J.

Internal stress simulation of a multilayer structure using measured wafer curvature accurately predicts the central wavelength shifts and spectrum ripple resulting from grinding and temperature change, thereby greatly improving the production yield of 50 GHz filters.

Published in:

Optical Fiber Communication Conference, 2004. OFC 2004  (Volume:1 )

Date of Conference:

23-27 Feb. 2004