By Topic

RF MEMS tunable inductor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
3 Author(s)
Zine-El-Abidine, I. ; TRLabs, Calgary Univ., Alta., Canada ; Okoniewski, M. ; McRory, J.G.

This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.

Published in:

Microwaves, Radar and Wireless Communications, 2004. MIKON-2004. 15th International Conference on  (Volume:3 )

Date of Conference:

17-19 May 2004