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Mechatronic design of RF MEMS switches for communication applications

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2 Author(s)
Lai, Yeong‐Lin ; Dept. of Mechatronics Eng., Nat. Changhua Univ. of Educ., Taiwan ; Yi-De Wen

In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.

Published in:

Circuits and Systems, 2004. MWSCAS '04. The 2004 47th Midwest Symposium on  (Volume:1 )

Date of Conference:

25-28 July 2004