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Ion microprobe analysis for acceptor doped II-VI compounds was performed. Samples of ZnSe and CdTe with Ag acceptors in the shallow depth were obtained by the laser processing. The ion beam induced luminescence spectrum of the Ag doped ZnSe sample had a peak, which was concerned with the acceptors and the formation of donors. The image of the ion beam induced charge for Ag doped CdTe crystal sample showed uneven profile, which might be due to the unevenness of laser irradiation effects. Further discussions on the amorphization are needed.