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A compact, efficient electrical dual-circuit topology for the representation of transient thermal coupling is presented. Based on controlled sources, the method allows an arbitrary level of complexity to be used for each self and coupled response. Two possible variations on the circuit form, and the resulting requirements for model extraction, are developed. The method is applied to the modeling of transient thermal self-heating and coupling data for a pair of thermal sources representative of integrated device structures in semi-infinite homogeneous as well as trench-isolated substrates.