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An integrated CMOS subnanosecond time-to-digital converter (TDC) has been developed and evaluated for positron emission tomography (PET) front-end applications. The TDC architecture combines an accurate digital counter and an analog time interpolation circuit to make the time interval measurement. The dynamic range of the TDC is programmable and can be easily extended without any timing resolution degradation. The converter was designed to operate over a reference clock frequency range of 62.5 MHz up to 100 MHz and can have a bin size as small as 312.5 ps LSB with 100-ns conversion times. Measurements indicate the TDC achieves a DNL of under ±0.20 LSB and INL less than ±0.30 LSB with an rms timing resolution of 0.312 LSB (97.5 ps), very close to the theoretical limit of 0.289 LSB (90 ps). The design is believed to be the first fully integrated CMOS subnanosecond TDC used in PET medical imaging and the first realization of a CMOS TDC that achieves an rms timing resolution below 100 ps within a 100-ns conversion time.