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Dual PE-CVD circulating fluidized bed reactor

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2 Author(s)
Tap, R. ; Fac. of Appl. Natural Sci., Univ. of Bayreuth, Germany ; Willert-Porada, M.

Fluidized bed reactors (FBR) are widely used in chemical engineering, as well as for raw materials processing because of the excellent heat and mass transfer in a fluidized bed. A new FBR was developed for plasma assisted synthesis and coating of granular solid materials by integration of the FBR simultaneously into two different microwave cavities: a microwave plasma cavity and a chemical vapor deposition (CVD) cavity, where microwave radiation is used to heat the granular material. With such a FBR, a systematic study of plasma activation of the granular material on the chemical reaction taking place at the surface of the granular material is possible. The interaction of the fluidized particles with the microwave field influences the ignition, as well as the stability of the microwave plasma significantly. As compared to a single stage CVD-FBR or a single stage plasma enhanced (PE-FBR) coating performance and process control is significantly improved by the newly developed dual-zone circulating PE-CVD-FBR.

Published in:

Plasma Science, IEEE Transactions on  (Volume:32 ,  Issue: 5 )

Date of Publication:

Oct. 2004

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