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High-precision operation in gantry systems is required to meet higher demands on positioning accuracy in a wide range of applications such as circuit assembly, precision metrology, and wafer stepping. In this paper, the experimental study of an observer-augmented composite control scheme for coordinated motion control of moving gantry stages for precision applications is presented. The scheme will be implemented and compared to other control schemes currently available for this purpose, including a master-slave and a set-point coordinated scheme. Experimental results will illustrate the enhanced performance of the fully coordinated control scheme with respect to tight trajectory tracking purposes.
Date of Publication: Nov. 2004