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CMOS monolithic atomic force microscope

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7 Author(s)
Barrettino, D. ; Phys. Electron. Lab., Swiss Fed. Inst. of Technol., Zurich, Switzerland ; Hafizovic, S. ; Volden, T. ; Sedivy, J.
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A single-chip atomic force microscope fabricated in industrial CMOS-technology with post-CMOs micromachining is presented, which comprises an array of twelve cantilevers with integrated deflection sensors and actuators, digital proportional-integral-derivative (PID) deflection controllers, amplification stages, offset compensation circuitry, digital filters for sensor-actuator coupling compensation, A/D and D/A converters, dedicated serial lines (one per cantilever) for fast data transfer, and an I2C serial interface for chip programming. Parallel scanning imaging evidenced a height resolution better than 10nm.

Published in:

VLSI Circuits, 2004. Digest of Technical Papers. 2004 Symposium on

Date of Conference:

17-19 June 2004

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