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The paper describes a robust control method for positioning piezoelectric actuators (ultrasonic motor) to achieve highly precise motion. The model employed to describe the motor is an uncertain second-order linear model. Based on the model, robust control can be designed. Real-time experimental results are provided to verify the effectiveness of the proposed scheme when applied to high precision motion trajectory tracking such as intracytoplasmic sperm injection (ICSI).
Communications, Circuits and Systems, 2004. ICCCAS 2004. 2004 International Conference on (Volume:2 )
Date of Conference: 27-29 June 2004