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Ultra-thin chip with permalloy film for high performance MS/RF CMOS

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7 Author(s)
Ohguro, T. ; SoC Res. & Dev. Center, Toshiba Corp. Semicond. Co., Kanagawa, Japan ; Sato, N. ; Matsuo, M. ; Kojima, K.
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In this paper, we describe the high analog performance of MOSFETs and inductors on 1.7μm ultra-thin chip with permalloy film.

Published in:

VLSI Technology, 2004. Digest of Technical Papers. 2004 Symposium on

Date of Conference:

15-17 June 2004