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High performance 10 nm gate length CMOSFETs for hp22 nm node LOP is demonstrated for the first time. Key process, such as elevated source/drain extension combined with flash lamp annealing, fully silicided metal gate, novel SiON, and optimization method under high Vdd condition which taking care of SRAM performance is described. Record high transconductance of 1706 mS/mm and over 400 GHz fi is achieved for nMOSFET. Bulk planar MOSFET structure can extend down to hp22 nm node.
Date of Conference: 15-17 June 2004