Scheduled System Maintenance:
On Monday, April 27th, IEEE Xplore will undergo scheduled maintenance from 1:00 PM - 3:00 PM ET (17:00 - 19:00 UTC). No interruption in service is anticipated.
By Topic

Edge-coupled InGaAs PIN photodiode with a light funnel waveguide

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Chyi-Da Yang ; Dept. of Electr. Eng., Nat. Tsing Hua Univ., Taiwan, Taiwan ; Po-Hsun Lei ; Der-Jin Pong ; Wu, Ming-Yuan
more authors

We have successfully fabricated InGaAs edge-coupled photodiodes (EC-PDs) with a light funnel integrated (LIFI) in front of the coupling aperture, called LIFI EC-PD, based on the self-terminated oxide polish (STOP), the crystallographic slope etching of InP, and the self-aligned diffusion (SAD) techniques. The LIFI EC-PD presents not only a lower dark current density (∼ 4.4 mA/cm2) but also a higher responsivity (∼ 0.4 A/W) than that of the mesa EC-PD (27 mA/cm2 and 0.26 A/W, respectively). Furthermore, the thick oxide film serves as the funnel in front of active-region aperture to enhance the coupling efficiency and to lower the bonding pad capacitance down to 50 fF. The lowered bonding pad capacitance can be beneficial in designing a device with a higher transit-time-limited frequency response of beyond 30 GHz. The LIFI EC-PD with a 1-μm thick absorption layer exhibits a 3-dB bandwidth of 20 GHz and a responsivity of ∼ 0.4 A/W.

Published in:

Quantum Electronics, IEEE Journal of  (Volume:40 ,  Issue: 11 )