Cart (Loading....) | Create Account
Close category search window
 

Automated micro-assembly of optical MEMS structure by centrifugal force

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Lai, K.W.C. ; Centre for Micro & Nano Syst., Chinese Univ. of Hong Kong, China ; Chung, P.S. ; Ming Li ; Li, W.J.

A very fast, low-cost, and reliable method to assemble micro structures suitable for MOEMS (micro-opto-electro-mechanical systems) applications is reported in this paper. In general, due to the minute scale of MEMS devices, inertia force is often neglected when dealing with MEMS components. However, we have demonstrated that inertia force can be significant even if the mass of micro structure is <1μg (a 250μm × 100 μm mass with 3.5 μm thick polysilicon and 0.5 μm thick Au layers). At this scale, we have shown that, mass inertia force can overcome some surface forces and thus be used for non-contact self-assembly of MEMS structures. Centrifugal force was applied to several hinged MUMPs (multi-user-MEMS-processes) chips by attaching the chips to a rotating disc. The micro hinged structures on the chips were shown to self-assemble by rotating themselves 90° out of substrate plane in most cases, and automatically lock themselves to designed latches. The assembly is also applicable on complex dynamic micro mirror. Our experimental setup and systematic approach to acquire force data during the centrifugal assembly process is described in this paper.

Published in:

Intelligent Control and Automation, 2004. WCICA 2004. Fifth World Congress on  (Volume:6 )

Date of Conference:

15-19 June 2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.