By Topic

Development of an automated microinjection system for fabrication of carbon nanotube sensors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
S. C. Qu ; Centre for Micro & Nano Syst., Chinese Univ. of Hong Kong, China ; C. K. M. Fung ; R. H. M. Chan ; W. J. Li

A novel automated carbon nanotube (CNT) microinjection system for batch fabricated bulk multiwalled carbon nanotubes (MWNT) based MEMS sensor is presented. The basic process includes AC electrophoretic manipulation of MWNT bundles on a silicon substrate and embedding them inside parylene C layers to provide a robust protection for the bundled MWNT. By utilizing AC electrophoretic technology, CNTs were successfully and repeatedly manipulated between micro-fabricated electrodes. Besides, the devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼ μW) and fast frequency response (∼ 100 kHz). Based on these experimental evidences, a feasible batch manufacturable method for functional CNT sensors by using the automated injection system is developed which will dramatically reduce production costs and production time of nanosensing devices and potentially enable fully automated assembly of CNT based devices.

Published in:

Intelligent Control and Automation, 2004. WCICA 2004. Fifth World Congress on  (Volume:6 )

Date of Conference:

15-19 June 2004