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Rigorous coupled-wave analysis of multilayered grating structures

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2 Author(s)
Wook Lee ; G. W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Degertekin, F.L.

Using a rigorous coupled-wave analysis, a (2 × 2) matrix method in homogenous layered media is generalized for a grating-embedded multilayer structure with (2M × 2M) dynamic and propagation matrices in both transverse-electric and transverse-magnetic polarizations, where M is the number of harmonics retained in the field expansion. A numerically stable algorithm to implement the method is described. Numerical results are presented for a diffraction-based optoacoustic sensor that consists of a reflective movable membrane and fixed grating fingers on a transparent quartz substrate and are compared with the scalar diffraction method to illustrate the limited applicability of the scalar approach.

Published in:

Lightwave Technology, Journal of  (Volume:22 ,  Issue: 10 )