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Pressure dependence of the electrical potential and electron temperature in a microwave-generated plasma

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2 Author(s)
Ismail, L.Z. ; Lab. of Laser Phys. & Applications, Cairo Univ., Giza, Egypt ; El-Magd, A.A.

The electron temperature in a stationary hydrogen plasma has been studied using a Langmuir probe. The measurements have been carried out over the pressure range from 3 mbar (2.25 torr) to 25 mbar (18.75 torr). The applied microwave power was varied from 50 to 450 W. The electron temperature shows a linear dependence on the applied microwave power. The self-space-charge field (in volts) of a hydrogen plasma shows a saturation behavior at higher microwave powers. The maximum value at the saturation of the field equals 6.8 V at a gas pressure of 15 mbar (11.25 torr) for all values of the input microwave radiation power. The polarities of the self-space-charge electric field are similar above this value and below it

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Plasma Science, IEEE Transactions on  (Volume:20 ,  Issue: 2 )