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The electron temperature in a stationary hydrogen plasma has been studied using a Langmuir probe. The measurements have been carried out over the pressure range from 3 mbar (2.25 torr) to 25 mbar (18.75 torr). The applied microwave power was varied from 50 to 450 W. The electron temperature shows a linear dependence on the applied microwave power. The self-space-charge field (in volts) of a hydrogen plasma shows a saturation behavior at higher microwave powers. The maximum value at the saturation of the field equals 6.8 V at a gas pressure of 15 mbar (11.25 torr) for all values of the input microwave radiation power. The polarities of the self-space-charge electric field are similar above this value and below it
Published in:
Plasma Science, IEEE Transactions on
(Volume:20
,
Issue:
2
)
Date of Publication: Apr 1992
- Page(s):
- 57 - 61
- ISSN :
- 0093-3813
- INSPEC Accession Number:
- 4166297
- Digital Object Identifier :
- 10.1109/27.134024
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Apr 1992
- Sponsored by :
- IEEE Nuclear and Plasma Sciences Society
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