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Asperity heating for repair of metal contact RF MEMS switches

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6 Author(s)
Jensen, Brian D. ; Dept. of Mech. Eng., Michigan Univ., Ann Arbor, MI, USA ; Huang, Kuangwei ; Chow, L. ; Saitou, K.
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We have experimentally observed the failure of metal contact RF MEMS switches due to a rapid rise in contact resistance during switching. We were able to repair the failed switches through heating the contact asperities by applying sufficient contact voltage. The data suggest the hypothesis that increasing contact resistance is caused by strain hardening of the contact surface. With this understanding, appropriate corrective measures can be taken to overcome failure, and suggestions for doing so are given in the paper.

Published in:

Microwave Symposium Digest, 2004 IEEE MTT-S International  (Volume:3 )

Date of Conference:

6-11 June 2004

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