Referenced Items are not available for this document.
This paper describes a novel structure for an electro-static actuated RF-MEMS metal-contact switch which achieves low-voltage actuations. Using a cantilever and placing a pull-down electrode outside the contact dimples, the actuation voltage can be reduced greatly while keeping a high contact force and restoration force. The simulation results show that the novel design operates around 20 V and produces a contact force of >200 μN per contact, and a restoration force of >115 μN per contact. The measured actuation voltage is 20-30 V which is higher than the designed value, and is thought to be caused by stress induced deflection. The measured RF isolation is 29 dB (Cu=28 fF) and the measured insertion loss is 0.2 dB (Rs=2.1 Ω) at 2 GHz.
Published in:
Microwave Symposium Digest, 2004 IEEE MTT-S International
(Volume:2
)
Date of Conference: 6-11 June 2004
- Page(s):
- 577 - 580 Vol.2
- ISSN :
- 0149-645X
- Print ISBN:
- 0-7803-8331-1
- INSPEC Accession Number:
- 8346257
- Digital Object Identifier :
- 10.1109/MWSYM.2004.1336047
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