Ion beam deposition of high T/sub c/ superconducting thin film in the bismuth system

Processing for the preparation of superconducting thin films by ion-beam sputtering is discussed. The main factors affecting the composition of the as-deposited films are analyzed, and the effects of various heat treatments on the properties of annealed films are studied. Superconducting BiSrCaCuO films on SrTiO/sub 3/ substrates with an onset temperature of 115 K and a zero-resistance temperature of 78 K were successfully prepared. The films had apparent c-axis texture. By adopting a Pb layer diffusion method, Bi(Pb)SrCaCuO films with a high-T/sub c/ phase were obtained.