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60-MHz wine-glass micromechanical-disk reference oscillator

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6 Author(s)
Yu-Wei Lin ; Michigan Univ., Ann Arbor, MI, USA ; Seungbae Lee ; Sheng-Shian Li ; Yuan Xie
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A reference oscillator utilizing a 60MHz, MEMS-based, wine glass disk vibrating micromechanical resonator with a Q of 48,000 and sufficient power handling capability to achieve a far-from-carrier phase noise of -130dBc/Hz is demonstrated. When divided down to 10MHz, this corresponds to an effective level of -145dBc/Hz.

Published in:

Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International

Date of Conference:

15-19 Feb. 2004