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SOI CMOS compatible low-power microheater optimization for the fabrication of smart gas sensors

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4 Author(s)
J. Laconte ; Res. Center in Micro & Nanoscopic Electron. Devices & Mater., Univ. catholique de Louvain, Louvain-la-Neuve, Belgium ; C. Dupont ; D. Flandre ; J. -P. Raskin

In this paper, an original design of a polysilicon loop-shaped microheater on a 1-μm thin-stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation and very low power consumption (20 mW for heating at 400°C). Moreover, the use of completely CMOS compatible tetramethyl ammonium hydroxide-based bulk-micromachining techniques allows an easy, smart gas sensor integration in SOI-CMOS technology.

Published in:

IEEE Sensors Journal  (Volume:4 ,  Issue: 5 )