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CMOS microelectrode array for extracellular stimulation and recording of electrogenic cells

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6 Author(s)
Heer, F. ; Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland ; Franks, W. ; McKay, I. ; Taschini, S.
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An extra cellular monolithic recording system fabricated in an industrial CMOS-technology combined with post-CMOS processing is presented. The chip comprises 16 platinum electrodes each equipped with stimulation and signal-conditioning circuitry. The micro-electrode array (MEA) is realized in a shifted-electrode design where the passivation is a 1.6 μm stack of alternating Si3N4 and SiO2 required for effective chip protection. The electrode and its adjacent circuitry (which includes a stimulation buffer and a readout band-pass filter) form a modular unit that is repeated in a 4 by 4 structure. Simultaneous recording and stimulation is possible at all electrodes at any time throughout the measurement. The system architecture includes multiplexers and A/D converters for each row and a digital control unit that scans the array and provides a digital interface with the outside world.

Published in:

Circuits and Systems, 2004. ISCAS '04. Proceedings of the 2004 International Symposium on  (Volume:4 )

Date of Conference:

23-26 May 2004