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A VCSEL structure with output coupling to an internal waveguide using integrated diffraction gratings has been demonstrated. The design and fabrication of the monolithically integrated structure, including epitaxial regrowth, is discussed and initial device characteristics are presented. While horizontal waveguides can be used to route optical signals between monolithically integrated components, a small amount of transmission is retained in the top DBR to enable on-wafer testing. This monolithic structure has the potential to enable VCSEL-based photonic integrated circuits on GaAs.
Date of Publication: 19 Aug. 2004