Simulation and optimization of an electrostatic microactuator for HDD head positioning

Dynamic characteristics of a microactuator have been simulated using finite-element numerical analysis. Based on numerical simulations, the response surface method (RSM) is used to optimize the spring parameters for the determination of suitable in-plane and out-of-plane natural frequencies of vibrations. Optimization of designs resulted in reduced voltage supply requirement to drive the recording head, and the reliability of the microactuator has also been enhanced.