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A moving-slider MEMS actuator for high-bandwidth HDD tracking

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7 Author(s)
Hirano, T. ; San Jose Res. Center, Hitachi Global Storage Technol. Inc., San Jose, CA, USA ; White, M. ; Yang, H. ; Scott, K.
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A moving-slider microactuator for high track pitch HDDs was investigated. A new microactuator design called a bipolar microactuator that enables both high stroke and good linearity was proposed. For easier assembly, a new microactuator fabrication technique was developed that enables the bonding pads on the sidewall of the microactuator chip. The microactuator was assembled into a server-class HDD, and a servo bandwidth of 8 kHz was demonstrated with an 80-kHz sampling rate.

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Magnetics, IEEE Transactions on  (Volume:40 ,  Issue: 4 )