Preparation of high-B/sub s/ Co-Fe soft magnetic thin films by electrodeposition

Co-Fe soft magnetic thin films with high-saturation magnetic flux density B/sub s/ were prepared by electrodeposition. The B/sub s/ value of the Co-Fe alloy films deposited from the conventional cell system is lower than that of bulk alloys. With the use of a separated compartment dual cell system, the B/sub s/ value of the Co-Fe alloy films was reached the same as that of bulk alloy. The coercivity H/sub c/ values were higher than 12 Oe; however, the H/sub c/ value could be lowered to 8 Oe by annealing in vacuum with an applied magnetic field. It is suggested that decreasing H/sub c/ of the films by annealing is caused by relaxation of lattice distortion. In addition, the high-B/sub s/ Co-Fe films show good corrosion resistance.