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Sensitive humidity sensor using Quartz Crystal Microbalance (QCM) is presented. A humidity change is detected by an oscillation frequency change depending on the mass of the absorbed H/sub 2/O molecule. Obtained coefficient of humidity-to-frequency shift is about 0.8%/Hz. We developed a crystal oscillator type humidity sensor using a thin Cr/sub 2/O/sub 3/ film. As a basic characteristic, sensitivity was obtained in relative humidity, and it was concluded that the presented sensor can serve as a practical humidity sensor.
SICE 2003 Annual Conference (Volume:2 )
Date of Conference: 4-6 Aug. 2003