Referenced Items are not available for this document.
Sensitive humidity sensor using Quartz Crystal Microbalance (QCM) is presented. A humidity change is detected by an oscillation frequency change depending on the mass of the absorbed H/sub 2/O molecule. Obtained coefficient of humidity-to-frequency shift is about 0.8%/Hz. We developed a crystal oscillator type humidity sensor using a thin Cr/sub 2/O/sub 3/ film. As a basic characteristic, sensitivity was obtained in relative humidity, and it was concluded that the presented sensor can serve as a practical humidity sensor.
Published in:
SICE 2003 Annual Conference
(Volume:2
)
Date of Conference: 4-6 Aug. 2003
- Page(s):
- 1175 - 1178 Vol.2
- Print ISBN:
- 0-7803-8352-4
- INSPEC Accession Number:
- 8118005
- Conference Location :
- Fukui, Japan
- Product Type:
- Conference Publications
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