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This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4×4 pixel display using this two-dimensional micromirror device has been demonstrated.
Selected Topics in Quantum Electronics, IEEE Journal of (Volume:10 , Issue: 3 )
Date of Publication: May-June 2004