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Spot optical measurements on micromachined mirrors for photonic switching

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4 Author(s)
Annovazzi-Lodi, V. ; Dipt. di Elettronica, Universita degli Studi di Pavia, Italy ; Benedetti, M. ; Merlo, S. ; Norgia, M.

This paper describes and compares three optical methods for performing spot measurements on micromachined mirrors, designed for photonic switching in fiberoptic networks. For static characterization, two spot-position detection systems, one based on a vidicon camera and the other based on a bidimensional silicon position sensitive detector (PSD), are illustrated, tested, and compared. Moreover, the dynamic behavior has been monitored with the PSD-based detection arrangement and with a semiconductor laser feedback interferometer. Advantages and drawbacks of these methods are highlighted. Testing is reported on torsional, silicon micromachined mirrors, with a single degree of freedom. High dc voltage for static measurements, and sinusoidal or white-noise or step excitation for dynamic characterization, have been used for mirror driving.

Published in:

Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:10 ,  Issue: 3 )

Date of Publication:

May-June 2004

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