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Monolithically cascaded micromirror pair driven by angular vertical combs for two-axis scanning

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5 Author(s)
Fujino, M. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Patterson, P.R. ; Nguyen, H. ; Piyawattanametha, W.
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In this work, monolithically cascaded one-axis micromirrors driven by angular vertical comb drives are designed and fabricated. Using W-shaped folded-beam optics, we demonstrate two-axis scanning covering ±6.0° two-dimensional area at resonant modes of 7.5 kHz, ±17 V for a fast-scanning mirror and 1.2 kHz, ±7 V for a slow-scanning mirror. The experimental results satisfy the requirements for a surveying instrument.

Published in:

Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:10 ,  Issue: 3 )

Date of Publication:

May-June 2004

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