Referenced Items are not available for this document.
We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spring-softening effect commonly found in electrostatic actuation, where the mirror resonance frequency decreases with increased tilt angle, is significantly reduced. Sidewall actuation enables superior performance of 3-D MEMS mirrors including large pull-in angles, reduced actuation voltages, improved device reliability, and fast switching times.
Published in:
Selected Topics in Quantum Electronics, IEEE Journal of
(Volume:10
,
Issue:
3
)
Date of Publication: May-June 2004
- Page(s):
- 472 - 477
- ISSN :
- 1077-260X
- INSPEC Accession Number:
- 8083928
- Digital Object Identifier :
- 10.1109/JSTQE.2004.828480
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 16 August 2004
- Issue Date :
- May-June 2004
- Sponsored by :
- IEEE Photonics Society
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