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An improved Reynolds-equation model for gas damping of microbeam motion

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2 Author(s)
M. A. Gallis ; Eng. Sci. Center, Sandia Nat. Labs., Albuquerque, NM, USA ; J. R. Torczynski

An improved gas-damping model for the out-of-plane motion of a near-substrate microbeam is developed based on the Reynolds equation (RE). A boundary condition for the RE is developed that relates the pressure at the beam edge to the beam motion. The coefficients in this boundary condition are determined from Navier-Stokes slip-jump (NSSJ) simulations for small slip lengths (relative to the gap height) and from direct simulation Monte Carlo (DSMC) molecular gas dynamics simulations for larger slip lengths. This boundary condition significantly improves the accuracy of the RE when the microbeam width is only slightly greater than the gap height between the microbeam and the substrate. The improved RE model is applied to microbeams fabricated using the SUMMiT V process.

Published in:

Journal of Microelectromechanical Systems  (Volume:13 ,  Issue: 4 )