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Nonlinear dynamic characteristics of piezoelectric bending actuators under strong applied electric field

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4 Author(s)
Yao, L.Q. ; Adv. Mater. for Micro & Nano Syst. Programme, Singapore-MIT Alliance, Singapore, Singapore ; Zhang, J.G. ; Lu, L. ; Lai, M.O.

Dynamic characteristics of piezoelectric bending actuators under low and high electric fields are studied using the asymptotic theory of nonstationary vibrations. The proposed nonlinear model predicts the changes in fundamental resonant frequencies of the piezoelectric cantilever. The predicted resonance amplitude of the tip deflections of the piezoelectric actuators, which increases with the increase in the magnitude of the electric field, well agrees with the experimental results. Additionally, the decrease in the mechanical quality factor with the increase in the electric field, the tip deflection of piezoelectric actuators near resonance frequency,and the amplitude of the tip deflection at the fundamental vibration tone under an applied electric field varying with time have also been obtained using the present model.

Published in:

Microelectromechanical Systems, Journal of  (Volume:13 ,  Issue: 4 )