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A method for precision patterning of silicone elastomer and its applications

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4 Author(s)
Ryu, Kee Suk ; Sensors & Syst. Group, Univ. of Illinois, Urbana, IL, USA ; Wang, Xuefeng ; Shaikh, Kashan ; Chang Liu

This paper presents a general microfabrication method for precision patterning of thin-film poly(dimethylsiloxane) (PDMS). The method enables PDMS microstructures with controlled lateral dimensions and thickness on a silicon or glass substrate. Two applications based on this new method are discussed. First, a scanning probe microscopy (SPM) probe with PDMS tip is developed and used for scanning probe contact printing (SPCP). Second, this paper demonstrates surface micromachined membranes with integrated silicone gaskets.

Published in:

Microelectromechanical Systems, Journal of  (Volume:13 ,  Issue: 4 )

Date of Publication:

Aug. 2004

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