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Effect of transverse force on the performance of quartz resonator force sensors

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4 Author(s)
Zheyao Wang ; Inst. of Microelectron., Tsinghua Univ., Beijing, China ; Yonggui Dong ; Huizhong Zhu ; Feng, Guanping

This paper discusses the effect of transverse force on the performance of quartz crystal resonator (QXR) force sensors that use symmetrical incomplete circular QXRs as sensing elements. Based on Lee's vibration theory and the transverse force-induced stress distribution, frequency changes are derived. This result and finite element method (FEM) are applied to investigate the performance of two metal-quartz combined sensors under the action of transverse force. Analytical and experimental results show that transverse force affects the sensitivity and linearity of QXR force sensors.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:51 ,  Issue: 4 )