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Small and low-loss IF SAW filters using zinc oxide film on quartz substrate

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2 Author(s)
Kadota, N. ; Murata Mfg. Co. Ltd., Kyoto, Japan ; Kando, H.

It was previously reported that a Rayleigh wave propagating on a zinc oxide film (ZnO)/ST-cut 35/spl deg/X propagation quartz substrate structure has the characteristics of an excellent temperature coefficient of frequency (TCF) and a large electromechanical coupling factor k.. This substrate was applied to various intermediate-frequency (IF) stage filters. During the filter development, it was clarified that a spurious response due to the Love wave was generated. In this study, a new quartz substrate has been developed with a specific cut and propagation angle, that has the same values of the TCF an(] the coupling factor as the above-mentioned ones. In addition, it does not have the spurious response due to the Love wave. The combination of this specific-cut-angle quartz and ZnO film has been applied to IF filters for wideband code division multiple access (W-CDMA) and narrow-band CDMA (N-CDMA) systems. The insertion losses of their IF filters were 3-5 dB better and their TCF was superior /spl Delta/f/f = 0.37 ppm//spl deg/C: one-third) compared with the conventional surface acoustic wave (SAW) filters.

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:51 ,  Issue: 4 )

Date of Publication:

April 2004

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