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A procedure to correct the error in the structure function based thermal measuring methods

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6 Author(s)

In this paper a methodology is presented to correct the systematic error of structure function based thermal material parameter measuring methods. This error stems from the fact that it is practically impossible to avoid parallel heat-flow paths in case of forced one-dimensional heat conduction. With the presented method we show how to subtract the effect of the parallel heat-flow paths from the measured structure function. With this correction methodology the systematic error of structure function based thermal material parameter measuring methods can be practically eliminated. Application examples demonstrate the accuracy increase obtained with the use of the method.

Published in:

Semiconductor Thermal Measurement and Management Symposium, 2004. Twentieth Annual IEEE

Date of Conference:

9-11 Mar 2004