Scheduled System Maintenance:
On Wednesday, July 29th, IEEE Xplore will undergo scheduled maintenance from 7:00-9:00 AM ET (11:00-13:00 UTC). During this time there may be intermittent impact on performance. We apologize for any inconvenience.
By Topic

New mechanism and dynamic control method of microelectrostatic actuator with three degrees of freedom

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Fukuda, T. ; Dept. of Mech. Eng., Nagoya Univ., Japan ; Tanaka, T.

A simplified structure for a novel microelectrostatic actuator is proposed. The tip of a micromanipulator needs multiple degrees of freedom (DOF) for the dexterous manipulation; the proposed actuator can give 3 DOF, thus allowing the micromanipulator to accomplish versatile, skillful motions. The structure of the actuator is suitable for the photo-etching process. The modeling of the nonlinear dynamics of the actuator is shown; simulations of the motion of the actuator are carried out with a proposed nonlinear feedback control. Experimental results on the actuator motion are also presented

Published in:

Robotics and Automation, 1991. Proceedings., 1991 IEEE International Conference on

Date of Conference:

9-11 Apr 1991