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Multimode large core (45×35 μm2) optical ridge waveguides are fabricated in the room temperature by ultraviolet (UV) imprinting of soft rubber template with the organic-inorganic sol-gel hybrid materials. The fabrication processes may be either well-known UV embossing or stamping. A new sol-gel hybrid material that is thermally stable has been developed for the fabrication of low-loss optical waveguides. The UV curable methacrylic sol-gel hybrid material is used for the core layer and fluorinated methacrylic sol-gel hybrid material is used for the cladding layer. The optical propagation loss of fabricated waveguide measured by the cutback method is 0.36 dB/cm at 850 nm and the surface roughness of waveguide is about 5 Å root mean square.
Date of Publication: Aug. 2004