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Low-loss InGaAsP/InP submicron optical waveguides fabricated by ICP etching

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9 Author(s)
Dupont, S. ; Inst. d''Electronique, Univ. des Sci. et Technol. de Lille, Villeneuve d''Ascq, France ; Beaurain, A. ; Miska, P. ; Zegaoui, M.
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The fabrication and characterisation of low-loss InGaAsP/InP optical submicron waveguides made with ICP etching is reported. Their width ranges from 0.2 to 2 μm. For the 0.5 μm width, the propagation losses at λ=1.55 μm as low as 4.2 dB/mm have been measured.

Published in:

Electronics Letters  (Volume:40 ,  Issue: 14 )