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Matching of HDP-chambers using golden tool methodology & VDS measurement tool

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1 Author(s)
Hoyer, G. ; Infineon Technol., Dresden, Germany

This Poster describes a procedure to improve the manufacturing performance of HDP-chambers. A group of maintenance and process engineers from the Infineon CVD organization and the equipment service from the tool manufacturer developed this method to minimize extreme yield losses because of differences in the chamber performance of identical chambers.

Published in:

Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop

Date of Conference:

4-6 May 2004