Cart (Loading....) | Create Account
Close category search window
 

Effect of substrate temperature and hydrogen dilution on thin silicon films deposited at low substrate temperatures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

12 Author(s)
Mates, T. ; Inst. of Phys., Acad. of Sci. of the Czech Republic, Praha, Czech Republic ; Fejfar, A. ; Ledinsky, M. ; Luterova, K.
more authors

Amorphous and microcrystalline silicon thin films for solar cells motivated by the usage of plastic substrates have been grown by PECVD with variable dilution at T/sub S/=80/spl deg/C and variable substrate temperature T/sub S/ from 35/spl deg/C to 200/spl deg/C at r/sub H/=133. A complex characterisation including topography pictures and maps of local currents by combined AFM, crystallinity by Raman spectroscopy, conductivity, activation energy, ambipolar diffusion length by SSPG and hydrogen content by ERDA has been performed. The possible misleading results of some methods have been reported as well as the key role of hydrogen at the low temperatures facilitating the crystallite formation.

Published in:

Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on  (Volume:2 )

Date of Conference:

18-18 May 2003

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.