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Implementation of rapid thermal processing to achieve greater than 15% efficient screen-printed ribbon silicon solar cells

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5 Author(s)
Rohatgi, A. ; Univ. Centre of Excellence for Photovoltaics Res. & Educ., Georgia Inst. of Technol., Atlanta, GA, USA ; Yelundur, V. ; Jeong, J.-W. ; Kim, D.S.
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This paper summarizes our progress in fabricating record-high efficiency ribbon Si solar cells with screen-printed and photolithography defined contacts. We have developed and optimized rapid thermal processing enhanced SiN/sub x/-induced hydrogenation to achieve record-high efficiency screen-printed EFG (15.9%) and String Ribbon (15.6%) cells and a high-efficiency string ribbon cell (17.8%) with photolithography defined contacts. A low-frequency SiN/sub x/ film and a two-step RTP firing process were critical in achieving high-efficiency screen-printed cells. Step 1 provides SiN/sub x/ induced hydrogenation and forms an aluminum doped back surface field. Step 2 is designed for Ag grid firing and includes rapid cooling to retain hydrogen introduced in Step 1.

Published in:

Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on  (Volume:2 )

Date of Conference:

18-18 May 2003