Functional and technological integration of measurement microsystems

The field of measurement microsystems has progressed with advances in the fields of microelectronics, micromechanics, microoptics, and digital signal processing (DSP). In this article, the author summarizes a unified conceptual basis for measurement microsystems, discusses some specifics of integration, and describes an innovative approach to the development of a micro-opto-electrical system (MOEMS), a microspectrometer on a chip. This example highlights the complexity of the problem of transition from a successful laboratory concept proof to a product that can be manufactured.