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Functional and technological integration of measurement microsystems

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1 Author(s)

The field of measurement microsystems has progressed with advances in the fields of microelectronics, micromechanics, microoptics, and digital signal processing (DSP). In this article, the author summarizes a unified conceptual basis for measurement microsystems, discusses some specifics of integration, and describes an innovative approach to the development of a micro-opto-electrical system (MOEMS), a microspectrometer on a chip. This example highlights the complexity of the problem of transition from a successful laboratory concept proof to a product that can be manufactured.

Published in:

Instrumentation & Measurement Magazine, IEEE  (Volume:7 ,  Issue: 2 )