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An optically powered wireless telemetry module for high-temperature MEMS sensing and communication

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3 Author(s)
Suster, M. ; Electr. Eng. & Comput. Sci. Dept., Case Western Reserve Univ., Cleveland, OH, USA ; Ko, W.H. ; Young, D.J.

A high-temperature, low-power silicon tunnel diode oscillator transmitter with an on-board optical power converter is proposed for harsh environment MEMS sensing and wireless data telemetry applications. The prototype sensing and transmitting module employs a MEMS silicon capacitive pressure sensor performing pressure to frequency conversion and a spiral loop serving as an inductor for the LC tank resonator and also as a transmitting antenna. A GaAs photodiode converts an incoming laser beam to an electrical energy for powering the prototype design. The system achieves a telemetry performance up to 250°C over a distance of 1.5 m with a transmitter power consumption of approximately 60 μW.

Published in:

Microelectromechanical Systems, Journal of  (Volume:13 ,  Issue: 3 )