Electromagnetically actuated mirror arrays for use in 3-D optical switching applications

This paper presents an electromagnetic MEMS mirror technology for use in 3-D optical switching applications. These mirrors may be actuated through large angles at low voltage and low current. Multiple coils on the backs of the mirrors interact with permanent magnetic fields to provide two-axis orthogonal actuation. A custom package brings the MEMS mirror array and magnets into close proximity. Actuation is linear versus drive current on both axes, and displays negligible charging and drift. These mirrors have achieved greater than 10/spl deg/ mechanical rotation per mA in each axis. The mirror rotation angle is hysteresis free to less than the 0.01/spl deg/ measurement accuracy.