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Parylene surface-micromachined membranes for sensor applications

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4 Author(s)
Zhifang Fan ; Syst. Group, Univ. of Illinois, Urbana, IL, USA ; Engel, J.M. ; Chen, J. ; Chang Liu

This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.

Published in:

Microelectromechanical Systems, Journal of  (Volume:13 ,  Issue: 3 )