By Topic

Mechanical characterization and design of flexible silicon microstructures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Lisby, T. ; DELTA Danish Electron., Light & Acoust., Horsholm, Denmark ; Nikles, S.A. ; Najafi, K. ; Hansen, O.
more authors

A variety of different silicon structures has been fabricated and characterized mechanically to optimize the design of silicon ribbon cables used in neural probes and multichip packaging structures. Boron-doped 3-μm-thick silicon beams were tested in three modes: bending in plane, twisting (along beam axis), and pushing. Various cable configurations were investigated (straight beams, curved beams, meandered beams, etc.) as well the effects of length, width, cable termination, and the presence of reinforcing spans between multistranded cables. The results along with finite element modeling indicated that many simple modifications could be made to increase the strength and flexibility of silicon ribbon cables. One structure, a meandered beam 200-μm wide and 2-mm long could be twisted up to 712°. It also was seen that structures having multiple 20-μm-wide beams were generally more robust than those with a single 500-μm-wide beam. Finally, a method for easy determination of the bending fracture strain is analyzed and verified. It was seen that the silicon structures tested broke after a strain slightly above 2%.

Published in:

Microelectromechanical Systems, Journal of  (Volume:13 ,  Issue: 3 )