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Angular vertical comb-driven tunable capacitor with high-tuning capabilities

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7 Author(s)
H. D. Nguyen ; Univ. of California, Los Angeles, CA, USA ; Dooyoung Hah ; P. R. Patterson ; Rumin Chao
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This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb fingers through a small rotation angle-an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF-a tuning ratio of more than 31:1, the highest ever reported. The maximum quality factor Q is 273 at 1 GHz near the minimum capacitance value.

Published in:

Journal of Microelectromechanical Systems  (Volume:13 ,  Issue: 3 )